Miniature Microelectromechanical Systems (MEMS) pressure sensors possess various
merits, such as low power consumption, being lightweight, having a small volume, accurate …

▪ Abstract The micromachining technology that emerged in the late 1980s can provide
micron-sized sensors and actuators. These micro transducers are able to be integrated with …

Since the discovery of piezoresistivity in silicon in the mid 1950s, silicon-based pressure
sensors have been widely produced. Micromachining technology has greatly benefited from …

Over the past four decades, the field of silicon piezoresistive pressure sensors has
undergone a major revolution in terms of design methodology and fabrication processes …

This book on mechanical microsensors is based on a course organized by the Swiss
Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and …

Wafer level packaging plays many important roles for MEMS (micro electro mechanical
systems), including cost, yield and reliability. MEMS structures on silicon chips are …

Molecular Sensors and Nanodevices: Principles, Designs and Applications in Biomedical
Engineering, Second Edition is designed to be used as a foundational text, aimed at …

From a fluid dynamics perspective, the introduction of microelectromechanical systems
(MEMS) has considerably broadened the spectrum of workable experiments. A typical …

Manufacturing processes that can create extremely small machines have been developed in
recent years. Microelectromechanical systems (MEMS) refer to devices that have …

A simulation program is developed which is capable of calculating the output responses of
piezoresistive pressure sensors as a function of pressure and temperature. Analytical …