Review of recent progress on silicon nitride-based photonic integrated circuits

T Sharma, J Wang, BK Kaushik, Z Cheng… - Ieee …, 2020 - ieeexplore.ieee.org
Silicon photonic devices used in the photonics industry over the past three decades have
helped in realizing large-scale photonic integrated circuits. Silicon nitride (Si 3 N 4) is …

Si photonics for practical LiDAR solutions

X Sun, L Zhang, Q Zhang, W Zhang - Applied Sciences, 2019 - mdpi.com
In the article the authors discuss light detection and ranging (LiDAR) for automotive
applications and the potential roles Si photonics can play in practice. The authors review …

Silicon nitride passive and active photonic integrated circuits: trends and prospects

C **ang, W **, JE Bowers - Photonics Research, 2022 - opg.optica.org
The use of silicon nitride in integrated photonics has rapidly progressed in recent decades.
Ultra-low-loss waveguides based on silicon nitride are a favorable platform for the research …

Visible-light silicon nitride waveguide devices and implantable neurophotonic probes on thinned 200 mm silicon wafers

WD Sacher, X Luo, Y Yang, FD Chen, T Lordello… - Optics express, 2019 - opg.optica.org
We present passive, visible light silicon nitride waveguides fabricated on≈ 100 µ m thick
200 mm silicon wafers using deep ultraviolet lithography. The best-case propagation losses …

Fully integrated solid-state LiDAR transmitter on a multi-layer silicon-nitride-on-silicon photonic platform

W Xu, Y Guo, X Li, C Liu, L Lu, J Chen… - Journal of Lightwave …, 2022 - ieeexplore.ieee.org
We report a LiDAR transmitter incorporating both a hybrid-integrated tunable external cavity
laser and a high-resolution 2-D optical phased array beam-steerer. Widely tunable single …

Heterogeneous III-V on silicon nitride amplifiers and lasers via microtransfer printing

C Op de Beeck, B Haq, L Elsinger, A Gocalinska… - Optica, 2020 - opg.optica.org
The development of ultralow-loss silicon-nitride-based waveguide platforms has enabled
the realization of integrated optical filters with unprecedented performance. Such passive …

A review of capabilities and scope for hybrid integration offered by silicon-nitride-based photonic integrated circuits

F Gardes, A Shooa, G De Paoli, I Skandalos, S Ilie… - Sensors, 2022 - mdpi.com
In this review we present some of the recent advances in the field of silicon nitride photonic
integrated circuits. The review focuses on the material deposition techniques currently …

[HTML][HTML] Optical, structural and composition properties of silicon nitride films deposited by reactive radio-frequency sputtering, low pressure and plasma-enhanced …

LY Beliaev, E Shkondin, AV Lavrinenko, O Takayama - Thin Solid Films, 2022 - Elsevier
We present a comparative study of optical properties of silicon nitride thin films deposited by
reactive radio-frequency (R-RF) sputtering, low pressure chemical vapor deposition …

Low-loss silicon nitride photonic ICs for near-infrared wavelength bandwidth

KA Buzaverov, AS Baburin, EV Sergeev, SS Avdeev… - Optics …, 2023 - opg.optica.org
Low-loss photonic integrated circuits (PICs) are the key elements in future quantum
technologies, nonlinear photonics and neural networks. The low-loss photonic circuits …

Library of single-etch silicon nitride grating couplers for low-loss and fabrication-robust fiber-chip interconnection

R Korček, D Medina Quiroz, Q Wilmart, S Edmond… - Scientific Reports, 2023 - nature.com
Abstract Silicon nitride (Si3N4) waveguides become an appealing choice to realize complex
photonic integrated circuits for applications in telecom/datacom transceivers, sensing, and …