Review of recent progress on silicon nitride-based photonic integrated circuits
Silicon photonic devices used in the photonics industry over the past three decades have
helped in realizing large-scale photonic integrated circuits. Silicon nitride (Si 3 N 4) is …
helped in realizing large-scale photonic integrated circuits. Silicon nitride (Si 3 N 4) is …
Si photonics for practical LiDAR solutions
In the article the authors discuss light detection and ranging (LiDAR) for automotive
applications and the potential roles Si photonics can play in practice. The authors review …
applications and the potential roles Si photonics can play in practice. The authors review …
Silicon nitride passive and active photonic integrated circuits: trends and prospects
The use of silicon nitride in integrated photonics has rapidly progressed in recent decades.
Ultra-low-loss waveguides based on silicon nitride are a favorable platform for the research …
Ultra-low-loss waveguides based on silicon nitride are a favorable platform for the research …
Visible-light silicon nitride waveguide devices and implantable neurophotonic probes on thinned 200 mm silicon wafers
We present passive, visible light silicon nitride waveguides fabricated on≈ 100 µ m thick
200 mm silicon wafers using deep ultraviolet lithography. The best-case propagation losses …
200 mm silicon wafers using deep ultraviolet lithography. The best-case propagation losses …
Fully integrated solid-state LiDAR transmitter on a multi-layer silicon-nitride-on-silicon photonic platform
We report a LiDAR transmitter incorporating both a hybrid-integrated tunable external cavity
laser and a high-resolution 2-D optical phased array beam-steerer. Widely tunable single …
laser and a high-resolution 2-D optical phased array beam-steerer. Widely tunable single …
Heterogeneous III-V on silicon nitride amplifiers and lasers via microtransfer printing
The development of ultralow-loss silicon-nitride-based waveguide platforms has enabled
the realization of integrated optical filters with unprecedented performance. Such passive …
the realization of integrated optical filters with unprecedented performance. Such passive …
A review of capabilities and scope for hybrid integration offered by silicon-nitride-based photonic integrated circuits
In this review we present some of the recent advances in the field of silicon nitride photonic
integrated circuits. The review focuses on the material deposition techniques currently …
integrated circuits. The review focuses on the material deposition techniques currently …
[HTML][HTML] Optical, structural and composition properties of silicon nitride films deposited by reactive radio-frequency sputtering, low pressure and plasma-enhanced …
We present a comparative study of optical properties of silicon nitride thin films deposited by
reactive radio-frequency (R-RF) sputtering, low pressure chemical vapor deposition …
reactive radio-frequency (R-RF) sputtering, low pressure chemical vapor deposition …
Low-loss silicon nitride photonic ICs for near-infrared wavelength bandwidth
Low-loss photonic integrated circuits (PICs) are the key elements in future quantum
technologies, nonlinear photonics and neural networks. The low-loss photonic circuits …
technologies, nonlinear photonics and neural networks. The low-loss photonic circuits …
Library of single-etch silicon nitride grating couplers for low-loss and fabrication-robust fiber-chip interconnection
Abstract Silicon nitride (Si3N4) waveguides become an appealing choice to realize complex
photonic integrated circuits for applications in telecom/datacom transceivers, sensing, and …
photonic integrated circuits for applications in telecom/datacom transceivers, sensing, and …