Abstract The Naval Research Laboratory (NRL) has developed a processing system based
on an electron beam-generated plasma and applied it to the processing of graphene. Unlike …

The process of numerical thermalization in particle-in-cell (PIC) simulations has been
studied extensively. It is analogous to Coulomb collisions in real plasmas, causing particle …

Plasmas generated using energetic electron beams are well known for their low electron
temperature (T e) and plasma potential, which makes them attractive for atomic-precision …

A three-dimensional model for magnetized electron beam generated plasma is described,
which includes a coupled fluid simulation of the bulk plasma and a Monte Carlo model for …

This article first presents quasi-in situ XPS measurements on Si 3 N 4 and a-Si samples after
exposure to an SiF 4/O 2 plasma at different cryogenic temperatures. A different behavior is …

Electron beam generated plasmas are generally characterized by a high plasma density (>
10 10 cm− 3), and very low electron temperatures (< 1 eV), making them well-suited for next …

In the ideal case, plasma-enhanced atomic layer etching enables the ability to not only
remove one monolayer of material but also leave adjacent layers undamaged. This dual …

The modulated approach of electron beam (EB) injection can achieve favorable parameters
for capacitive coupled plasmas (CCP). In this work, a one-dimensional particle-in-cell/Monte …

Precise control over both the relative and absolute flux of plasma species as well as their
energy deposition at surfaces is critical to enabling the plasma processing of materials with …

We describe our investigations of the influence of electron beam parameters and working
gas on the ion flux coming from the beam-produced plasma (beam plasma) to a target …