With an increasing demand of photoelectric components, the micro/ultraprecision machining
technology has become more and more important. However, for some particular …

High-bandwidth nano-positioning stages (NPSs) have boosted the advancement of modern
ultra-precise, ultra-fast measurement and manufacturing technologies owing to their fast …

The stick-slip piezoelectric actuator with simple driving signal and structure is a very
promising type for achieving the high resolution and large stroke. However, as a typical …

Due to the simple structure and ideal step-like motion curve, the inertial impact piezoelectric
actuator is considered as a highly promising driving device. However, the existing impact …

The normal-stressed electromagnetic actuated fast tool servo (FTS) plays an important role
in modern ultra-precision manufacturing due to its high actuation force density and fast …

By serially combining two piezoelectrically actuated compliant stages, a dual-stage fast tool
servo (FTS) is developed to greatly enhance the trajectory tracking performance of …

Tool servo diamond turning is a promising method for generating complex-shaped optics.
Considering the dynamic oscillation of the tool, servo dynamics are essential for the …

Micro/nanostructured surfaces have wide applications in optics, electronics, and aerospace.
However, the current fast tool servo (FTS) cannot satisfy the large demand for …

Nano-gratings induced structural color is of great value in various anti-counterfeiting and
decoration applications. Despite the attractive rendering performances, the manipulation …

In this article, an intelligent feedforward prediction and compensation scheme to combine
with a dual-loop high-bandwidth controller is proposed for high-speed and high-precision …