In this paper, we review a recent technology development based on coupled MEMS
resonators that has the potential of fundamentally transforming MEMS resonant sensors …

This paper reviews the development of silicon resonant accelerometers from 1987 to 2022.
For more than 30 years, silicon resonant accelerometers have developed into varieties of …

This work demonstrates a unique temperature-compensated differential resonant
accelerometer fabricated in a wafer-scale encapsulation process. By utilizing a pair of ultra …

In this paper, for the first time, the mass sensitivity of a 3-DoF mode localized electrostatically
coupled resonator is investigated and characterized under atmospheric pressure. A …

A new multi-sensing scheme via nonlinear weakly coupled resonators is introduced in this
paper, which can simultaneously detect two different physical stimuli by monitoring the …

This paper reports, for the first time, on-chip ovenization of an epitaxially encapsulated
resonant accelerometer to improve the stability of scale factor and bias. A double-ended …

In the past few decades, advances in micro-electromechanical systems (MEMS) have
produced robust, accurate, and high-performance devices. Extensive research has been …

Thin-film encapsulation (TFE) is one of the promising wafer-level packaging techniques for
microelectromechanical systems (MEMS) devices. One of the drawbacks of TFE is that it is …

This paper demonstrates a post-fabrication technique for creating highly compliant
structures inside a hermetic, wafer-scale encapsulation process. Single crystal silicon micro …

Single-resonator-based (SRB) sensors have thrived in many sensing applications. However,
they cannot meet the high-sensitivity requirement of future high-end markets such as ultra …